An ultra-compact micro-valve for low pressure gas flow control

Stephen Wilson, Sam Owens, David Macmanus

    Research output: Contribution to conferencePaper

    Abstract

    We describe the fabrication and performance characterisation of a ~0.1cm3 micro-valve, designed to regulate a compressed gas supply at pressures <1bar. The electro-active components were fabricated by ultra-precision grinding in combination with standard micro-fabrication techniques. The structural components were made from a photo-etchable glass-ceramic. Steady jets with velocities greater than 200m/s were measured using supply pressures = 60kPa and static actuation voltages = 40V. The gauge jet pressure ratio was linearly related to the static actuation voltage below 60kPa. The exceptional light weight of the valves and their simple construction could open up new possibilities for active aerodynamic flow-control systems, for medical diagnostics and for personalised healthcare systems, amongst other applications.
    Original languageEnglish
    Pages194-197
    Number of pages4
    Publication statusPublished - 2012
    EventACTUATOR 2012 International conference on new actuators and drive systems - Bremen, Germany
    Duration: 18 Jun 201220 Jun 2012

    Conference

    ConferenceACTUATOR 2012 International conference on new actuators and drive systems
    CountryGermany
    CityBremen
    Period18/06/1220/06/12
    Other13th International Conference on New Actuators &
    7th International Exhibition on Smart Actuators and Drive Systems

    Keywords

    • MEMS, PZT, micro-actuator, aerodynamic, Pitot, velocity

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