Abstract
Plasma nanotexturing, i.e. plasma etching with simultaneous roughening in the nano to micron scale, is used to create roughness on PMMA plates or glass slides coated with PMMA films. Mimicking nature, we use this roughness to create "smart" surfaces, with controlled optical and wetting properties. We present results that show combined antireflectivity, superhydrophobicity and superamphiphobicity for optimal plasma treatment time of only one-side of the samples (better results are expected for two-side treatment). In particular, using only 1.5 min of plasma nanotexturing and etching of PMMA in oxygen plasma, followed by vacuum deposition of a perfluorinated self-assembled monolayer, a reduction of reflectivity by 30% (compared to its initial value), superhydrophobicity and superamphiphobicity were achieved for liquids with surface tension more than 50 mN/m.
Original language | English |
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Pages (from-to) | 33-38 |
Number of pages | 6 |
Journal | Microelectronic Engineering |
Volume | 121 |
Early online date | 19 Mar 2014 |
DOIs | |
Publication status | Published - 1 Jun 2014 |
Keywords
- Antireflective
- Biomimetic
- Oleophobic
- Plasma nanotexturing
- Superamphiphobic
- Superhydrophobic
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering