Abstract
High frequency ultrasound transducer arrays that can operate at frequencies above 30 MHz are needed for high resolution medical imaging. A key issue in the development of these miniature imaging arrays is the need for photolithographic patterning of array electrodes. To achieve this directly on a 1-3 piezocomposite requires not only planar, parallel and smooth surfaces, but also an epoxy composite filler that is resistant to chemicals, heat and vacuum. This paper reports the full characterisation of an epoxy filler suitable for fine-scale piezocomposite fabrication as well as photolithographic processes.
Original language | English |
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Title of host publication | 2008 IEEE Ultrasonics Symposium |
Subtitle of host publication | proceedings |
Editors | Kendall R. Waters |
Place of Publication | New York |
Publisher | IEEE Computer Society |
Pages | 62-65 |
Number of pages | 4 |
ISBN (Electronic) | 9781424424801 |
ISBN (Print) | 9781424424283 |
DOIs | |
Publication status | Published - 2008 |
Event | 2008 IEEE International Ultrasonics Symposium (IUS) - Beijing, China Duration: 2 Nov 2008 → 5 Nov 2008 http://ewh.ieee.org/conf/ius_2008/ |
Conference
Conference | 2008 IEEE International Ultrasonics Symposium (IUS) |
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Abbreviated title | 2008 IEEE IUS |
Country/Territory | China |
City | Beijing |
Period | 2/11/08 → 5/11/08 |
Internet address |
Keywords
- Epoxy adhesive
- Cure temperature
- Material properties
- Acoustic properties
- High frequency array
- Photolithography
- Ultrasound
- Composite transducers