Characterisation of ion transportation during electroplating of high aspect ratio microvias using megasonic agitation

S. Costello, N. Strusevich, M.K. Patel, C. Bailey, D. Flynn, R.W. Kay, D. Price, M. Bennet, A.C. Jones, R. Habeshaw, C. Demore, S. Cochran, M.P.Y. Desmulliez

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    Earth & Environmental Sciences