Characterisation of ion transportation during electroplating of high aspect ratio microvias using megasonic agitation

S. Costello, N. Strusevich, M.K. Patel, C. Bailey, D. Flynn, R.W. Kay, D. Price, M. Bennet, A.C. Jones, R. Habeshaw, C. Demore, S. Cochran, M.P.Y. Desmulliez

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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    Physics

    Engineering

    Chemical Engineering