Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

TY - JOUR

T1 - Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

AU - Duval, Fabrice F. C.

AU - Wilson, Stephen A.

AU - Ensell, Graham

AU - Evanno, Nicolas M. P.

AU - Cain, Markys G.

AU - Whatmore, Roger W.

PY - 2007/1/8

Y1 - 2007/1/8

N2 - This paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were compared with an analytical model which showed that the PZT thin film has a Young's modulus of 110 GPa and a piezoelectric coefficient d(31,f) of 30 pC/N. The blocking force was investigated by means of a micro-machined silicon force sensor based on the silicon piezoresistive effect. The generated force was detected by measuring a change in voltage within a piezoresistors bridge. The sensor was calibrated using a commercial nano-indenter as a force and displacement standard. Application of the method showed that a 700 mu m long micro-cantilever showed a maximum displacement of 800 nm and a blocking force of 0.1 mN at an actuation voltage of 5 V, within experimental error of the theoretical predictions based on the known piezoelectric and elastic properties of the PZT film. (c) 2006 Elsevier B.V All rights reserved.

AB - This paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were compared with an analytical model which showed that the PZT thin film has a Young's modulus of 110 GPa and a piezoelectric coefficient d(31,f) of 30 pC/N. The blocking force was investigated by means of a micro-machined silicon force sensor based on the silicon piezoresistive effect. The generated force was detected by measuring a change in voltage within a piezoresistors bridge. The sensor was calibrated using a commercial nano-indenter as a force and displacement standard. Application of the method showed that a 700 mu m long micro-cantilever showed a maximum displacement of 800 nm and a blocking force of 0.1 mN at an actuation voltage of 5 V, within experimental error of the theoretical predictions based on the known piezoelectric and elastic properties of the PZT film. (c) 2006 Elsevier B.V All rights reserved.

U2 - 10.1016/j.sna.2006.03.035

DO - 10.1016/j.sna.2006.03.035

M3 - Article

SN - 0924-4247

VL - 133

SP - 35

EP - 44

JO - Sensors and Actuators A - Physical

JF - Sensors and Actuators A - Physical

IS - 1

ER -