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Comparison of optical and electrical techniques for dimensional metrology on alternating aperture phase-shifting masks

  • S. Smith
  • , A. Tsiamis
  • , A.J. Walton
  • , J.T.M. Stevenson
  • , M. McCallum
  • , A.C. Hourd

    Research output: Contribution to journal › Article › peer-review

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