Abstract
The challenges for the realization of a miniaturized high frequency ultrasonic transducer linear array lie in the interconnections on the fine pitch piezoceramic elements. Within the footprint the size of a needle, only peripheral interconnections can be allowed on the transducer array such that the acoustic operations on both faces of the vibrating piezoelectric elements are not obstructed. The very low maximum processing temperature allowed also poses difficulty for conventional bonding techniques. This article presents 3-dimensional packaging using spirally rolled flexible circuits, room-temperature anisotropic conductive bonding and stencil printing for the setup of a wafer-level production process flow. © 2011 IEEE.
Original language | English |
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Title of host publication | EPTC 2011 |
Subtitle of host publication | IEEE 13th Electronics Packaging Technology Conference |
Publisher | IEEE Computer Society |
Pages | 93-98 |
Number of pages | 6 |
ISBN (Electronic) | 978-1-4577-1981-3 |
ISBN (Print) | 978-1-4577-1983-7 |
DOIs | |
Publication status | Published - 2011 |
Event | 13th IEEE Electronics Packaging Technology Conference - , Singapore Duration: 7 Dec 2011 → 9 Dec 2011 http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=6178148 |
Conference
Conference | 13th IEEE Electronics Packaging Technology Conference |
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Country/Territory | Singapore |
Period | 7/12/11 → 9/12/11 |
Internet address |