Design Optimisation and fabrication of SU-8 based electro-thermal micro-grippers

Robert Keatch; Huirong Le; Ruth Mackay

doi:10.1007/s12213-010-0029-y

Design Optimisation and fabrication of SU-8 based electro-thermal micro-grippers

Robert Keatch
, Huirong Le
, Ruth Mackay

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

Abstract

This paper describes the design and simulation of an integrated micro-electro-mechanical system (MEMS) to be used for micromanipulation. Electrothermal micro-grippers were designed for micro-tensile tests of biological materials which require relatively low force and temperature. Finite element analysis (FEA) was performed to examine gripper opening displacements, tip temperature and stresses. The feasibility of various materials including silicon, plated nickel and SU-8 was examined for applications in biological environment. The paper looks at fabrication techniques employed to allow a cheaper, wet etching solution, to the fabrication of SU-8 micro-grippers. The structure was successfully fabricated and tested. The results showed that the micro-gripper could be actuated by fairly low voltage.

Original language	English
Pages (from-to)	13-22
Number of pages	10
Journal	Journal of Micro-Nano Mechatronics
Volume	6
Issue number	1-2
DOIs	https://doi.org/10.1007/s12213-010-0029-y
Publication status	Published - 4 Nov 2010

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title = "Design Optimisation and fabrication of SU-8 based electro-thermal micro-grippers",

abstract = "This paper describes the design and simulation of an integrated micro-electro-mechanical system (MEMS) to be used for micromanipulation. Electrothermal micro-grippers were designed for micro-tensile tests of biological materials which require relatively low force and temperature. Finite element analysis (FEA) was performed to examine gripper opening displacements, tip temperature and stresses. The feasibility of various materials including silicon, plated nickel and SU-8 was examined for applications in biological environment. The paper looks at fabrication techniques employed to allow a cheaper, wet etching solution, to the fabrication of SU-8 micro-grippers. The structure was successfully fabricated and tested. The results showed that the micro-gripper could be actuated by fairly low voltage. ",

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N2 - This paper describes the design and simulation of an integrated micro-electro-mechanical system (MEMS) to be used for micromanipulation. Electrothermal micro-grippers were designed for micro-tensile tests of biological materials which require relatively low force and temperature. Finite element analysis (FEA) was performed to examine gripper opening displacements, tip temperature and stresses. The feasibility of various materials including silicon, plated nickel and SU-8 was examined for applications in biological environment. The paper looks at fabrication techniques employed to allow a cheaper, wet etching solution, to the fabrication of SU-8 micro-grippers. The structure was successfully fabricated and tested. The results showed that the micro-gripper could be actuated by fairly low voltage.

AB - This paper describes the design and simulation of an integrated micro-electro-mechanical system (MEMS) to be used for micromanipulation. Electrothermal micro-grippers were designed for micro-tensile tests of biological materials which require relatively low force and temperature. Finite element analysis (FEA) was performed to examine gripper opening displacements, tip temperature and stresses. The feasibility of various materials including silicon, plated nickel and SU-8 was examined for applications in biological environment. The paper looks at fabrication techniques employed to allow a cheaper, wet etching solution, to the fabrication of SU-8 micro-grippers. The structure was successfully fabricated and tested. The results showed that the micro-gripper could be actuated by fairly low voltage.

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JF - Journal of Micro-Nano Mechatronics

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ER -

Design Optimisation and fabrication of SU-8 based electro-thermal micro-grippers

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