e(31),(f) determination for PZT films using a conventional 'd(33)' meter

J E A Southin, Stephen Wilson, D Schmitt, R W Whatmore

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    Abstract

    A new and simple method is described for the determination of the piezoelectric coefficients d(33,f) and e(31,f) for piezoelectric films deposited on substrates using a conventional point-loading 'd(33)' or 'Berlincourt' piezometer. An analytical mathematical model is developed which simulates the dynamical flexure of such films when a ring-supported sample is subject to central loading. Classical plate theory and elastic analysis are used to calculate the stresses in doped lead zirconate titanate (PZT) him for different radii of supporting rings, enabling both piezoelectric coefficients to be determined through a simple modification to the piezometer. The analytical model for the radial stresses has been evaluated in comparison with the results of finite element analysis and has shown a good correlation. The new measurement technique has been applied to both thick films of PZT and thin films of manganese-doped lead zirconate titanate (PMZT) on silicon substrates. The values of d(33,f) and e(31,f) obtained experimentally are found to be similar to these that have been determined by more elaborate methods.

    Original languageEnglish
    Pages (from-to)1456-1460
    Number of pages5
    JournalJournal of Physics D: Applied Physics
    Volume34
    Issue number10
    Publication statusPublished - 21 May 2001

    Cite this

    Southin, J. E. A., Wilson, S., Schmitt, D., & Whatmore, R. W. (2001). e(31),(f) determination for PZT films using a conventional 'd(33)' meter. Journal of Physics D: Applied Physics, 34(10), 1456-1460.