Abstract
This paper presents the experimental design and construction of a new type of standing wave piezoelectric ultrasonic micro-motor. The motor, which is based on a meso-scale prototype [1-3], uses a metallic cymbal to convert the contour mode vibrations of a piezoelectric plate into vertical oscillations. These are further converted by means of an elastic-fin friction drive to produce rotary actuation. The motor operates on a single-phase electrical supply and direct control of the output speed and torque can be achieved by adjusting the amplitude and frequency of the supply voltage.
Original language | English |
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Pages (from-to) | 165-169 |
Number of pages | 5 |
Journal | Integrated Ferroelectrics |
Volume | 63 |
DOIs | |
Publication status | Published - 2004 |