Flextensional ultrasonic motor using the contour mode of a square piezoelectric plate

J T Leinvuo, Stephen Wilson, R W Whatmore

    Research output: Contribution to journalArticle

    12 Citations (Scopus)

    Abstract

    This paper presents the design, fabrication, and characterization of a new type of standing wave piezoelectric ultrasonic motor. The motor uses a metallic flextensional amplifier, or cymbal, to convert the contour mode vibrations of a square piezoelectric ceramic plate into flexural oscillations, which are further converted to produce rotary actuation by means of an elastic-fin friction drive. The motor operates on a single-phase electrical supply. A beryllium copper rotor design with three-fin configuration was adopted, and the geometry was varied to include different material thicknesses, fin lengths, and inclinations. The best stall torque and no load speed for a 25-mm square motor were 0.72 Nmm and 895 r/minute, respectively. The behavior of the stator structure was analyzed by ANSYS finite element software using harmonic and modal analyses. The vibration mode estimated by finite element modeling (FEM) was confirmed by laser Doppler vibration measurements.

    Original languageEnglish
    Pages (from-to)929-936
    Number of pages8
    JournalIEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
    Volume51
    Issue number8
    Publication statusPublished - Aug 2004

    Cite this