Investigation of electrical and optical CD measurement techniques for the characterisation of on-mask GHOST proximity corrected features

A. Tsiamis, S. Smith, J.T.M. Stevenson, A.J. Walton, M. McCallum, A.C. Hourd, O. Toublan

    Research output: Chapter in Book/Report/Conference proceeding › Other chapter contribution

    5 Citations (Scopus)

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    Engineering