Laser assisted microstructuring of amorphous silicon for microelectronics

M. M. Halim, A. Abdolvand, Y. Fan, S. K. Persheyev, C. Main, E. U. Rafailov, M. J. Rose

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si: H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications. (C) 2010 Optical Society of America

    Original languageEnglish
    Title of host publicationCLEO/QELS
    Subtitle of host publication2010 Laser Science to Photonic Applications
    Place of PublicationNew York
    PublisherIEEE
    Pages1-2
    Number of pages2
    ISBN (Electronic)9781557528902
    DOIs
    Publication statusPublished - 2010
    EventConference on Lasers and Electro-Optics (CLEO)/Quantum Electronics and Laser Science Conference (QELS) - San Jose
    Duration: 16 May 201021 May 2010
    http://www.cleoconference.org/library/images/cleo/Archive/CLEO-Archive-2010.pdf

    Conference

    ConferenceConference on Lasers and Electro-Optics (CLEO)/Quantum Electronics and Laser Science Conference (QELS)
    Abbreviated titleCLEO/QELS 2010
    CitySan Jose
    Period16/05/1021/05/10
    Internet address

    Keywords

    • Laser materials processing
    • Materials processing
    • Excimer lasers

    Cite this

    Halim, M. M., Abdolvand, A., Fan, Y., Persheyev, S. K., Main, C., Rafailov, E. U., & Rose, M. J. (2010). Laser assisted microstructuring of amorphous silicon for microelectronics. In CLEO/QELS: 2010 Laser Science to Photonic Applications (pp. 1-2). [JTuD17] IEEE. https://doi.org/10.1364/CLEO.2010.JTuD17