Laser assisted microstructuring of amorphous silicon for microelectronics

M. M. Halim; A. Abdolvand; Y. Fan; S. K. Persheyev; C. Main; E. U. Rafailov; M. J. Rose

doi:10.1364/CLEO.2010.JTuD17

Laser assisted microstructuring of amorphous silicon for microelectronics

M. M. Halim, A. Abdolvand, Y. Fan, S. K. Persheyev, C. Main, E. U. Rafailov, M. J. Rose

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si: H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications. (C) 2010 Optical Society of America

Original language	English
Title of host publication	CLEO/QELS
Subtitle of host publication	2010 Laser Science to Photonic Applications
Place of Publication	New York
Publisher	IEEE
Pages	1-2
Number of pages	2
ISBN (Electronic)	9781557528902
DOIs	https://doi.org/10.1364/CLEO.2010.JTuD17
Publication status	Published - 2010
Event	Conference on Lasers and Electro-Optics (CLEO)/Quantum Electronics and Laser Science Conference (QELS) - San Jose Duration: 16 May 2010 → 21 May 2010 http://www.cleoconference.org/library/images/cleo/Archive/CLEO-Archive-2010.pdf

Conference

Conference	Conference on Lasers and Electro-Optics (CLEO)/Quantum Electronics and Laser Science Conference (QELS)
Abbreviated title	CLEO/QELS 2010
City	San Jose
Period	16/05/10 → 21/05/10
Internet address	http://www.cleoconference.org/library/images/cleo/Archive/CLEO-Archive-2010.pdf

Keywords

Laser materials processing
Materials processing
Excimer lasers

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10.1364/CLEO.2010.JTuD17

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@inproceedings{2a8ed9738a694d4a97dc7c4144b637ea,

title = "Laser assisted microstructuring of amorphous silicon for microelectronics",

abstract = "We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si: H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications. (C) 2010 Optical Society of America",

keywords = "Laser materials processing, Materials processing, Excimer lasers",

author = "Halim, {M. M.} and A. Abdolvand and Y. Fan and Persheyev, {S. K.} and C. Main and Rafailov, {E. U.} and Rose, {M. J.}",

year = "2010",

doi = "10.1364/CLEO.2010.JTuD17",

language = "English",

pages = "1--2",

booktitle = "CLEO/QELS",

publisher = "IEEE",

note = "Conference on Lasers and Electro-Optics (CLEO)/Quantum Electronics and Laser Science Conference (QELS), CLEO/QELS 2010 ; Conference date: 16-05-2010 Through 21-05-2010",

url = "http://www.cleoconference.org/library/images/cleo/Archive/CLEO-Archive-2010.pdf",

}

Halim, MM, Abdolvand, A , Fan, Y, Persheyev, SK, Main, C, Rafailov, EU & Rose, MJ 2010, Laser assisted microstructuring of amorphous silicon for microelectronics. in CLEO/QELS: 2010 Laser Science to Photonic Applications., JTuD17, IEEE, New York, pp. 1-2, Conference on Lasers and Electro-Optics (CLEO)/Quantum Electronics and Laser Science Conference (QELS), San Jose, 16/05/10. https://doi.org/10.1364/CLEO.2010.JTuD17

TY - GEN

T1 - Laser assisted microstructuring of amorphous silicon for microelectronics

AU - Halim, M. M.

AU - Abdolvand, A.

AU - Fan, Y.

AU - Persheyev, S. K.

AU - Main, C.

AU - Rafailov, E. U.

AU - Rose, M. J.

PY - 2010

Y1 - 2010

N2 - We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si: H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications. (C) 2010 Optical Society of America

AB - We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si: H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications. (C) 2010 Optical Society of America

KW - Laser materials processing

KW - Materials processing

KW - Excimer lasers

UR - http://www.scopus.com/inward/record.url?scp=84894032324&partnerID=8YFLogxK

U2 - 10.1364/CLEO.2010.JTuD17

DO - 10.1364/CLEO.2010.JTuD17

M3 - Conference contribution

SP - 1

EP - 2

BT - CLEO/QELS

PB - IEEE

CY - New York

T2 - Conference on Lasers and Electro-Optics (CLEO)/Quantum Electronics and Laser Science Conference (QELS)

Y2 - 16 May 2010 through 21 May 2010

ER -

Laser assisted microstructuring of amorphous silicon for microelectronics

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Keywords

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