Laser assisted microstructuring of amorphous silicon for microelectronics

M. M. Halim; A. Abdolvand; Y. Fan; S. K. Persheyev; C. Main; E. U. Rafailov; M. J. Rose

Laser assisted microstructuring of amorphous silicon for microelectronics

M. M. Halim, A. Abdolvand, Y. Fan, S. K. Persheyev, C. Main, E. U. Rafailov, M. J. Rose

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.

Original language	English
Title of host publication	Optics InfoBase Conference Papers 2010
Publisher	Optical Society of America
ISBN (Print)	9781557528896
Publication status	Published - 1 Dec 2010
Event	Conference on Lasers and Electro-Optics, CLEO 2010 - San Jose, CA, United States Duration: 16 May 2010 → 21 May 2010

Conference

Conference	Conference on Lasers and Electro-Optics, CLEO 2010
Country/Territory	United States
City	San Jose, CA
Period	16/05/10 → 21/05/10

ASJC Scopus subject areas

Instrumentation
Atomic and Molecular Physics, and Optics

Cite this

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title = "Laser assisted microstructuring of amorphous silicon for microelectronics",

abstract = "We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.",

author = "Halim, {M. M.} and A. Abdolvand and Y. Fan and Persheyev, {S. K.} and C. Main and Rafailov, {E. U.} and Rose, {M. J.}",

year = "2010",

month = dec,

day = "1",

language = "English",

isbn = "9781557528896",

booktitle = "Optics InfoBase Conference Papers 2010",

publisher = "Optical Society of America",

address = "United States",

note = "Conference on Lasers and Electro-Optics, CLEO 2010 ; Conference date: 16-05-2010 Through 21-05-2010",

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TY - GEN

T1 - Laser assisted microstructuring of amorphous silicon for microelectronics

AU - Halim, M. M.

AU - Abdolvand, A.

AU - Fan, Y.

AU - Persheyev, S. K.

AU - Main, C.

AU - Rafailov, E. U.

AU - Rose, M. J.

PY - 2010/12/1

Y1 - 2010/12/1

N2 - We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.

AB - We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.

UR - http://www.scopus.com/inward/record.url?scp=84894032324&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84894032324

SN - 9781557528896

BT - Optics InfoBase Conference Papers 2010

PB - Optical Society of America

T2 - Conference on Lasers and Electro-Optics, CLEO 2010

Y2 - 16 May 2010 through 21 May 2010

ER -

Laser assisted microstructuring of amorphous silicon for microelectronics

Abstract

Conference

ASJC Scopus subject areas

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