Laser assisted microstructuring of amorphous silicon for microelectronics

M. M. Halim, A. Abdolvand, Y. Fan, S. K. Persheyev, C. Main, E. U. Rafailov, M. J. Rose

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.

    Original languageEnglish
    Title of host publicationOptics InfoBase Conference Papers 2010
    PublisherOptical Society of America
    ISBN (Print)9781557528896
    Publication statusPublished - 1 Dec 2010
    EventConference on Lasers and Electro-Optics, CLEO 2010 - San Jose, CA, United States
    Duration: 16 May 201021 May 2010

    Conference

    ConferenceConference on Lasers and Electro-Optics, CLEO 2010
    CountryUnited States
    CitySan Jose, CA
    Period16/05/1021/05/10

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  • Cite this

    Halim, M. M., Abdolvand, A., Fan, Y., Persheyev, S. K., Main, C., Rafailov, E. U., & Rose, M. J. (2010). Laser assisted microstructuring of amorphous silicon for microelectronics. In Optics InfoBase Conference Papers 2010 Optical Society of America.