Metastability in undoped microcrystalline silicon thin films deposited by HWCVD

S. K. Persheyev, K. A. O'Neill, S. Anthony, M. J. Rose, V. Smirnov, S. Reynolds

    Research output: Chapter in Book/Report/Conference proceedingChapter (peer-reviewed)

    5 Citations (Scopus)
    Original languageEnglish
    Title of host publicationAmorphous and nanocrystalline silicon science and technology--2004
    Subtitle of host publicationsymposium held April 13-16, 2004, San Francisco, California, U.S.A.
    EditorsGautam Ganguly
    Place of PublicationWarrendale, Pa
    PublisherMaterials Research Society
    Pages41-46
    Number of pages6
    Volume808
    ISBN (Print)155899758X
    Publication statusPublished - 2004
    EventSymposium A: Amorphous and Nanocrystalline Silicon Science and Technology - San Francisco, United States
    Duration: 12 Apr 200416 Apr 2004
    http://www.mrs.org/s04-program-a/

    Conference

    ConferenceSymposium A: Amorphous and Nanocrystalline Silicon Science and Technology
    CountryUnited States
    CitySan Francisco
    Period12/04/0416/04/04
    Internet address

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