Abstract
A method of reducing photoelectron yield (PEY) and/or secondary electron yield (SEY) of a surface of a target (10), comprises applying laser radiation to the surface of the target (10) to produce a periodic arrangement of structures on the surface, wherein the laser radiation comprises pulsed laser radiation comprising a series oflaser pulses and the power density of the pulses is in a range 0.01 TW/cm2 to 3 TW/cm2, optionally 0.1 TW/cm2 to 3 TW/cm2.
Original language | English |
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Patent number | WO2016/207660 A1 |
IPC | B23K 26/00 (2014.01) |
Priority date | 24/06/15 |
Filing date | 24/06/16 |
Publication status | Published - 29 Dec 2016 |