Micromachined diaphragm transducers for miniaturised ultrasound arrays

Flavio Griggio, Christine E. M. Demore, Hyunsoo Kim, James Gigliotti, Yongqiang Qiu, Thomas N. Jackson, Kyusun Choi, Rick L. Tutwiler, Sandy Cochran, Susan Trolier-McKinstry

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    15 Citations (Scopus)


    Miniaturised ultrasound transducer arrays with integrated electronics will in future enable significant advances in high resolution medical imaging and in acoustic tweezing for bioscience research. However, their development has been limited by challenges in scaling down conventional piezoelectric ultrasound transducer fabrication and interconnection techniques. Piezoelectric thin film transducers on silicon substrates can overcome these challenges by reducing dimensional constraints in fabrication and facilitating integration with electronics, including allowing low drive voltages in transmission. We present the design, fabrication and testing of diaphragm transducers to evaluate the feasibility of integrated piezoelectric micromachined ultrasonic transducers (PMUTs). Transducers have been designed, then fabricated with 80 µm and 130 µm diameter diaphragms, the latter in arrays with ~500 diaphragms. Receive measurements demonstrate functionality of both devices, with pulse-echo bandwidths of approximately 90% for the 80 ?m diaphragms, demonstrating initial feasibility for ultrasound imaging.
    Original languageEnglish
    Title of host publication2012 IEEE International Ultrasonics Symposium
    Number of pages4
    ISBN (Print)9781467345613
    Publication statusPublished - 2012
    Event2012 IEEE International Ultrasonics Symposium (IUS) - Dresden, Germany
    Duration: 7 Oct 201210 Oct 2012


    Conference2012 IEEE International Ultrasonics Symposium (IUS)
    Abbreviated title2012 IEEE IUS
    Internet address


    • Silicon
    • integrated electronics
    • medical image resolution
    • echo
    • Educational institutions
    • acoustic tweezing
    • biomedical ultrasonics
    • ultrasonic imaging
    • size 80 mum
    • piezoelectric thin film transducer
    • micromachining
    • integrated piezoelectric micromachined ultrasonic transducer fabrication
    • Substrates
    • piezoelectric transducers
    • miniaturised ultrasound array
    • size 130 mum
    • Bandwidth
    • pulse echo bandwidth
    • PMUT
    • micromachined diaphragm transducer
    • Transducers
    • bioscience research
    • Acoustics
    • ultrasonic transducer arrays
    • radiation pressure
    • Ultrasonic imaging
    • piezoelectric thin films
    • medical image processing
    • transducer array
    • diaphragm transducer


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