New materials for micro-scale sensors and actuators: an engineering review

Stephen A. Wilson, Renaud P. J. Jourdain, Qi Zhang, Robert A. Dorey, Chris R. Bowen, Magnus Willander, Qamar Ul Wahab, Magnus Willander, M. Al-hilli Safaa, Omer Nur, Eckhard Quandt, Christer Johansson, Emmanouel Pagounis, Manfred Kohl, Jovan Matovic, Bjorn Samel, Wouter van der Wijngaart, Edwin W. H. Jager, Daniel Carlsson, Zoran DjinovicMichael Wegener, Carmen Moldovan, Rodica Iosub, Estefania Abad, Michael Wendlandt, Cristina Rusu, Katrin Persson

    Research output: Contribution to journalReview articlepeer-review

    406 Citations (Scopus)

    Abstract

    This paper provides a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices. Recent advances in piezoelectric, magnetostrictive and shape-memory alloy systems are discussed and emerging transducer materials such as magnetic nanoparticles, expandable micro-spheres and conductive polymers are introduced. Materials properties, transducer mechanisms and end applications are described and the potential for integration of the materials with ancillary systems components is viewed as an essential consideration. The review concludes with a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology. (C) 2007 Elsevier B.V. All rights reserved.

    Original languageEnglish
    Pages (from-to)1-129
    Number of pages129
    JournalMaterials Science & Engineering R-Reports
    Volume56
    Issue number1-6
    DOIs
    Publication statusPublished - 2007

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