New materials for micro-scale sensors and actuators: an engineering review

Stephen A. Wilson; Renaud P. J. Jourdain; Qi Zhang; Robert A. Dorey; Chris R. Bowen; Magnus Willander; Qamar Ul Wahab; Magnus Willander; M. Al-hilli Safaa; Omer Nur; Eckhard Quandt; Christer Johansson; Emmanouel Pagounis; Manfred Kohl; Jovan Matovic; Bjorn Samel; Wouter van der Wijngaart; Edwin W. H. Jager; Daniel Carlsson; Zoran Djinovic; Michael Wegener; Carmen Moldovan; Rodica Iosub; Estefania Abad; Michael Wendlandt; Cristina Rusu; Katrin Persson

doi:10.1016/j.mser.2007.03.001

New materials for micro-scale sensors and actuators: an engineering review

Stephen A. Wilson, Renaud P. J. Jourdain, Qi Zhang, Robert A. Dorey, Chris R. Bowen, Magnus Willander, Qamar Ul Wahab, Magnus Willander, M. Al-hilli Safaa, Omer Nur, Eckhard Quandt, Christer Johansson, Emmanouel Pagounis, Manfred Kohl, Jovan Matovic, Bjorn Samel, Wouter van der Wijngaart, Edwin W. H. Jager, Daniel Carlsson, Zoran DjinovicMichael Wegener, Carmen Moldovan, Rodica Iosub, Estefania Abad, Michael Wendlandt, Cristina Rusu, Katrin Persson

Research output: Contribution to journal › Review article › peer-review

484 Citations (Scopus)

Abstract

This paper provides a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices. Recent advances in piezoelectric, magnetostrictive and shape-memory alloy systems are discussed and emerging transducer materials such as magnetic nanoparticles, expandable micro-spheres and conductive polymers are introduced. Materials properties, transducer mechanisms and end applications are described and the potential for integration of the materials with ancillary systems components is viewed as an essential consideration. The review concludes with a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology. (C) 2007 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	1-129
Number of pages	129
Journal	Materials Science and Engineering: R: Reports
Volume	56
Issue number	1-6
DOIs	https://doi.org/10.1016/j.mser.2007.03.001
Publication status	Published - 2007

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Wilson, S. A., Jourdain, R. P. J., Zhang, Q., Dorey, R. A., Bowen, C. R., Willander, M., Wahab, Q. U., Willander, M., Safaa, M. A., Nur, O., Quandt, E., Johansson, C., Pagounis, E., Kohl, M., Matovic, J., Samel, B., van der Wijngaart, W., Jager, E. W. H., Carlsson, D., ... Persson, K. (2007). New materials for micro-scale sensors and actuators: an engineering review. Materials Science and Engineering: R: Reports, 56(1-6), 1-129. https://doi.org/10.1016/j.mser.2007.03.001

@article{81f04a0b52d94705bae665b3320a0283,

title = "New materials for micro-scale sensors and actuators: an engineering review",

abstract = "This paper provides a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices. Recent advances in piezoelectric, magnetostrictive and shape-memory alloy systems are discussed and emerging transducer materials such as magnetic nanoparticles, expandable micro-spheres and conductive polymers are introduced. Materials properties, transducer mechanisms and end applications are described and the potential for integration of the materials with ancillary systems components is viewed as an essential consideration. The review concludes with a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology. (C) 2007 Elsevier B.V. All rights reserved.",

author = "Wilson, {Stephen A.} and Jourdain, {Renaud P. J.} and Qi Zhang and Dorey, {Robert A.} and Bowen, {Chris R.} and Magnus Willander and Wahab, {Qamar Ul} and Magnus Willander and Safaa, {M. Al-hilli} and Omer Nur and Eckhard Quandt and Christer Johansson and Emmanouel Pagounis and Manfred Kohl and Jovan Matovic and Bjorn Samel and {van der Wijngaart}, Wouter and Jager, {Edwin W. H.} and Daniel Carlsson and Zoran Djinovic and Michael Wegener and Carmen Moldovan and Rodica Iosub and Estefania Abad and Michael Wendlandt and Cristina Rusu and Katrin Persson",

year = "2007",

doi = "10.1016/j.mser.2007.03.001",

language = "English",

volume = "56",

pages = "1--129",

journal = "Materials Science and Engineering: R: Reports",

issn = "0927-796X",

publisher = "Elsevier",

number = "1-6",

}

Wilson, SA, Jourdain, RPJ, Zhang, Q, Dorey, RA, Bowen, CR, Willander, M, Wahab, QU, Willander, M, Safaa, MA, Nur, O, Quandt, E, Johansson, C, Pagounis, E, Kohl, M, Matovic, J, Samel, B, van der Wijngaart, W, Jager, EWH, Carlsson, D, Djinovic, Z, Wegener, M, Moldovan, C, Iosub, R, Abad, E, Wendlandt, M, Rusu, C & Persson, K 2007, 'New materials for micro-scale sensors and actuators: an engineering review', Materials Science and Engineering: R: Reports, vol. 56, no. 1-6, pp. 1-129. https://doi.org/10.1016/j.mser.2007.03.001

TY - JOUR

T1 - New materials for micro-scale sensors and actuators

T2 - an engineering review

AU - Wilson, Stephen A.

AU - Jourdain, Renaud P. J.

AU - Zhang, Qi

AU - Dorey, Robert A.

AU - Bowen, Chris R.

AU - Willander, Magnus

AU - Wahab, Qamar Ul

AU - Willander, Magnus

AU - Safaa, M. Al-hilli

AU - Nur, Omer

AU - Quandt, Eckhard

AU - Johansson, Christer

AU - Pagounis, Emmanouel

AU - Kohl, Manfred

AU - Matovic, Jovan

AU - Samel, Bjorn

AU - van der Wijngaart, Wouter

AU - Jager, Edwin W. H.

AU - Carlsson, Daniel

AU - Djinovic, Zoran

AU - Wegener, Michael

AU - Moldovan, Carmen

AU - Iosub, Rodica

AU - Abad, Estefania

AU - Wendlandt, Michael

AU - Rusu, Cristina

AU - Persson, Katrin

PY - 2007

Y1 - 2007

N2 - This paper provides a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices. Recent advances in piezoelectric, magnetostrictive and shape-memory alloy systems are discussed and emerging transducer materials such as magnetic nanoparticles, expandable micro-spheres and conductive polymers are introduced. Materials properties, transducer mechanisms and end applications are described and the potential for integration of the materials with ancillary systems components is viewed as an essential consideration. The review concludes with a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology. (C) 2007 Elsevier B.V. All rights reserved.

AB - This paper provides a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices. Recent advances in piezoelectric, magnetostrictive and shape-memory alloy systems are discussed and emerging transducer materials such as magnetic nanoparticles, expandable micro-spheres and conductive polymers are introduced. Materials properties, transducer mechanisms and end applications are described and the potential for integration of the materials with ancillary systems components is viewed as an essential consideration. The review concludes with a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology. (C) 2007 Elsevier B.V. All rights reserved.

U2 - 10.1016/j.mser.2007.03.001

DO - 10.1016/j.mser.2007.03.001

M3 - Review article

SN - 0927-796X

VL - 56

SP - 1

EP - 129

JO - Materials Science and Engineering: R: Reports

JF - Materials Science and Engineering: R: Reports

IS - 1-6

ER -

New materials for micro-scale sensors and actuators: an engineering review

Abstract

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