Abstract
A new net shape process has been developed to fabricate 1-3 piezocomposites. Solid polymer moulds and high solid loading lead zirconate titanate (PZT) paste, made by the viscous polymer processing (VPP), have been utilised in an embossing/lost mould method. 1-3 structures with PZT pillar feature sizes of 50-100 µm and aspect ratios of 5-10 have been fabricated successfully, and the composites have been characterized by electrical impedance and pulse-echo measurements. The results show that the viscous polymer processing is a very promising technique for the fabrication of 1-3 composites for high frequency ultrasonic transducer applications.
Original language | English |
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Pages (from-to) | 201-205 |
Number of pages | 5 |
Journal | Ferroelectrics |
Volume | 304 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2004 |
Keywords
- PZT
- 1-3 composites
- Lost mould method
- High frequency
- Ultrasonic transducers
- Piezoelectric materials