Plasma Directed Assembly: Process Issues, Materials and Applications

Dimitrios Kontziampasis; Athanasios Smyrnakis; Vassilios Constantoudis; Evangelos Gogolides

Plasma Directed Assembly: Process Issues, Materials and Applications

Dimitrios Kontziampasis (Lead / Corresponding author), Athanasios Smyrnakis, Vassilios Constantoudis, Evangelos Gogolides

Mechanical and Industrial Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The modern trend in nanofabrication is the use of self or directed assembly methods to form periodic or semi-periodic patterns in the nanoscale. Block copolymer lithography and colloidal lithography are used mostly to create these patterns. Our group [1, 2] has shown that oxygen plasma can direct the formation of organized nanodots on the surface of PMMA films (Fig. 1) and then transfer the pattern to a subsequent Silicon substrate.

Original language	English
Title of host publication	Proceedings of the 13th International Conference on Plasma Surface Engineering
Pages	262-265
Number of pages	4
Publication status	Published - 2012
Event	13th International Conference on Plasma Surface Engineering - Garmisch-Partenkirchen, Germany Duration: 10 Sept 2012 → 14 Sept 2012

Conference

Conference	13th International Conference on Plasma Surface Engineering
Country/Territory	Germany
City	Garmisch-Partenkirchen
Period	10/09/12 → 14/09/12

Cite this

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title = "Plasma Directed Assembly: Process Issues, Materials and Applications",

abstract = "The modern trend in nanofabrication is the use of self or directed assembly methods to form periodic or semi-periodic patterns in the nanoscale. Block copolymer lithography and colloidal lithography are used mostly to create these patterns. Our group [1, 2] has shown that oxygen plasma can direct the formation of organized nanodots on the surface of PMMA films (Fig. 1) and then transfer the pattern to a subsequent Silicon substrate.",

author = "Dimitrios Kontziampasis and Athanasios Smyrnakis and Vassilios Constantoudis and Evangelos Gogolides",

year = "2012",

language = "English",

pages = "262--265",

booktitle = "Proceedings of the 13th International Conference on Plasma Surface Engineering",

note = "13th International Conference on Plasma Surface Engineering ; Conference date: 10-09-2012 Through 14-09-2012",

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TY - GEN

T1 - Plasma Directed Assembly

T2 - 13th International Conference on Plasma Surface Engineering

AU - Kontziampasis, Dimitrios

AU - Smyrnakis, Athanasios

AU - Constantoudis, Vassilios

AU - Gogolides, Evangelos

PY - 2012

Y1 - 2012

N2 - The modern trend in nanofabrication is the use of self or directed assembly methods to form periodic or semi-periodic patterns in the nanoscale. Block copolymer lithography and colloidal lithography are used mostly to create these patterns. Our group [1, 2] has shown that oxygen plasma can direct the formation of organized nanodots on the surface of PMMA films (Fig. 1) and then transfer the pattern to a subsequent Silicon substrate.

AB - The modern trend in nanofabrication is the use of self or directed assembly methods to form periodic or semi-periodic patterns in the nanoscale. Block copolymer lithography and colloidal lithography are used mostly to create these patterns. Our group [1, 2] has shown that oxygen plasma can direct the formation of organized nanodots on the surface of PMMA films (Fig. 1) and then transfer the pattern to a subsequent Silicon substrate.

M3 - Conference contribution

SP - 262

EP - 265

BT - Proceedings of the 13th International Conference on Plasma Surface Engineering

Y2 - 10 September 2012 through 14 September 2012

ER -

Plasma Directed Assembly: Process Issues, Materials and Applications

Abstract

Conference

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