The modern trend in nanofabrication is the use of self or directed assembly methods to form periodic or semi-periodic patterns in the nanoscale. Block copolymer lithography and colloidal lithography are used mostly to create these patterns. Our group [1, 2] has shown that oxygen plasma can direct the formation of organized nanodots on the surface of PMMA films (Fig. 1) and then transfer the pattern to a subsequent Silicon substrate.
|Title of host publication||Proceedings of the 13th International Conference on Plasma Surface Engineering|
|Number of pages||4|
|Publication status||Published - 2012|
|Event||13th International Conference on Plasma Surface Engineering - Garmisch-Partenkirchen, Germany|
Duration: 10 Sept 2012 → 14 Sept 2012
|Conference||13th International Conference on Plasma Surface Engineering|
|Period||10/09/12 → 14/09/12|