Principles of plasma discharges and material processing: M.A. Lieberman and A.J. Lichtenberg, John Wiley, New York, 1994, 572 pp

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title = "Principles of plasma discharges and material processing: M.A. Lieberman and A.J. Lichtenberg, John Wiley, New York, 1994, 572 pp",

author = "Robert Keatch",

year = "1996",

month = nov,

doi = "10.1016/0026-2692(96)82781-9",

language = "English",

volume = "27",

pages = "804",

journal = "Microelectronics Journal",

issn = "0026-2692",

publisher = "Elsevier",

number = "8",

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T2 - M.A. Lieberman and A.J. Lichtenberg, John Wiley, New York, 1994, 572 pp

AU - Keatch, Robert

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U2 - 10.1016/0026-2692(96)82781-9

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SN - 0026-2692

VL - 27

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JF - Microelectronics Journal

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