Principles of plasma discharges and material processing: M.A. Lieberman and A.J. Lichtenberg, John Wiley, New York, 1994, 572 pp

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)804
Number of pages1
JournalMicroelectronics Journal
Volume27
Issue number8
DOIs
Publication statusPublished - Nov 1996

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