Original language | English |
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Pages (from-to) | 804 |
Number of pages | 1 |
Journal | Microelectronics Journal |
Volume | 27 |
Issue number | 8 |
DOIs | |
Publication status | Published - Nov 1996 |
Principles of plasma discharges and material processing: M.A. Lieberman and A.J. Lichtenberg, John Wiley, New York, 1994, 572 pp
Research output: Contribution to journal › Article › peer-review