Quantitative hydrogen measurements in PECVD and HWCVD a-Si:H using FTIR spectroscopy

D. M. Goldie, S. K. Persheyev

    Research output: Contribution to journalArticle

    11 Citations (Scopus)

    Fingerprint Dive into the research topics of 'Quantitative hydrogen measurements in PECVD and HWCVD a-Si:H using FTIR spectroscopy'. Together they form a unique fingerprint.

    Chemical Compounds

    Engineering & Materials Science