The effect of germane variation on microstructure in polycrystalline Si/Si1-xGex thin films grown by rapid thermal chemical vapour deposition: Fractal characterisation using scanning probemicroscopy

P. A. Campbell, D. G. Walmsley, R. L. F. Chong, D. Gay, H. S. Gamble, D. W. McNeill

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Engineering & Materials Science

Chemical Compounds