Skip to main navigation Skip to search Skip to main content

The effect of germane variation on microstructure in polycrystalline Si/Si1-xGex thin films grown by rapid thermal chemical vapour deposition: Fractal characterisation using scanning probemicroscopy

  • P. A. Campbell
  • , D. G. Walmsley
  • , R. L. F. Chong
  • , D. Gay
  • , H. S. Gamble
  • , D. W. McNeill

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'The effect of germane variation on microstructure in polycrystalline Si/Si1-xGex thin films grown by rapid thermal chemical vapour deposition: Fractal characterisation using scanning probemicroscopy'. Together they form a unique fingerprint.
Sort by

Keyphrases

Engineering

Material Science