The Production of High-Aspect-Ratio Microstructures (HARMS)

TY - JOUR

T1 - The Production of High-Aspect-Ratio Microstructures (HARMS)

AU - Keatch, Robert

AU - Lawrenson, Brian

AU - Finlay, Mark

AU - Lewis, Barrie

AU - Horsfield, Colin

PY - 2000

Y1 - 2000

N2 - Current techniques used for the production of individual hohlraum components require single-point ultra-precision machining. In an effort to reduce cost and time, mass-production techniques adopted from the Microelectronics sector have been developed. These Microengineering processes will allow a variety of materials to be investigated with various geometrical features and surface topographies. Using thick photosensitive polymers, combined with electroplating processes, complex 3-D structures can be fabricated in multiple stages. In this review the production of a hohlraum end-cap used for indirect inertial confinement fusion (ICF) is presented as an example of this procedure.

AB - Current techniques used for the production of individual hohlraum components require single-point ultra-precision machining. In an effort to reduce cost and time, mass-production techniques adopted from the Microelectronics sector have been developed. These Microengineering processes will allow a variety of materials to be investigated with various geometrical features and surface topographies. Using thick photosensitive polymers, combined with electroplating processes, complex 3-D structures can be fabricated in multiple stages. In this review the production of a hohlraum end-cap used for indirect inertial confinement fusion (ICF) is presented as an example of this procedure.

UR - https://www.scopus.com/pages/publications/0034227892

U2 - 10.13182/fst00-a36131

DO - 10.13182/fst00-a36131

M3 - Article

SN - 0748-1896

VL - 38

SP - 139

EP - 142

JO - Fusion Technology

JF - Fusion Technology

IS - 1

ER -