Thick film PZT transducer arrays for particle manipulation

Yongqiang Qiu; Han Wang; Aleksandrs Bolhovitins; Christine Demore; Sandy Cochran; Sylvia Gebhardt; Andreas Schonecker

doi:10.1109/ULTSYM.2013.0487

Thick film PZT transducer arrays for particle manipulation

Yongqiang Qiu, Han Wang, Aleksandrs Bolhovitins, Christine Demore, Sandy Cochran, Sylvia Gebhardt, Andreas Schonecker

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

This paper reports the fabrication and evaluation of a two-dimensional thick film PZT ultrasonic transducer array operating at about 7.5 MHz for particle manipulation. All layers on the array are screen-printed and sintered on an AlO substrate without further processes or patterning. The measured dielectric constant of the PZT is 2250 ± 100, and the dielectric loss is 0.09 ± 0.005 at 10 kHz. Finite element analysis has been used to predict the behaviour of the array and impedance spectroscopy and laser vibrometry have been used to characterise its performance. The measured deflection of a single activate element is on the order of tens of nanometres with 20 V input. Particle manipulation experiments have been performed by coupling the thick film array to a capillary containing polystyrene microspheres in water.

Original language	English
Title of host publication	Ultrasonics Symposium (IUS), 2013 IEEE International
Subtitle of host publication	21-25 July 2013
Publisher	IEEE
Pages	1911-1914
Number of pages	4
ISBN (Print)	9781467356862
DOIs	https://doi.org/10.1109/ULTSYM.2013.0487
Publication status	Published - 2013
Event	Ultrasonics Symposium (IUS), 2013 IEEE International - Prague, Czech Republic Duration: 21 Jul 2013 → 25 Jul 2013

Conference

Conference	Ultrasonics Symposium (IUS), 2013 IEEE International
Country/Territory	Czech Republic
City	Prague
Period	21/07/13 → 25/07/13

Keywords

2-D array
particle manipulation
screen-printing
thick film

Access to Document

10.1109/ULTSYM.2013.0487

Cite this

@inproceedings{6f0dbce1cd0f4725b141b6ede4b90085,

title = "Thick film PZT transducer arrays for particle manipulation",

abstract = "This paper reports the fabrication and evaluation of a two-dimensional thick film PZT ultrasonic transducer array operating at about 7.5 MHz for particle manipulation. All layers on the array are screen-printed and sintered on an AlO substrate without further processes or patterning. The measured dielectric constant of the PZT is 2250 ± 100, and the dielectric loss is 0.09 ± 0.005 at 10 kHz. Finite element analysis has been used to predict the behaviour of the array and impedance spectroscopy and laser vibrometry have been used to characterise its performance. The measured deflection of a single activate element is on the order of tens of nanometres with 20 V input. Particle manipulation experiments have been performed by coupling the thick film array to a capillary containing polystyrene microspheres in water.",

keywords = "2-D array, particle manipulation, screen-printing, thick film",

author = "Yongqiang Qiu and Han Wang and Aleksandrs Bolhovitins and Christine Demore and Sandy Cochran and Sylvia Gebhardt and Andreas Schonecker",

year = "2013",

doi = "10.1109/ULTSYM.2013.0487",

language = "English",

isbn = "9781467356862",

pages = "1911--1914",

booktitle = "Ultrasonics Symposium (IUS), 2013 IEEE International",

publisher = "IEEE",

note = "Ultrasonics Symposium (IUS), 2013 IEEE International ; Conference date: 21-07-2013 Through 25-07-2013",

}

Qiu, Y, Wang, H, Bolhovitins, A, Demore, C, Cochran, S, Gebhardt, S & Schonecker, A 2013, Thick film PZT transducer arrays for particle manipulation. in Ultrasonics Symposium (IUS), 2013 IEEE International: 21-25 July 2013. IEEE, pp. 1911-1914, Ultrasonics Symposium (IUS), 2013 IEEE International , Prague, Czech Republic, 21/07/13. https://doi.org/10.1109/ULTSYM.2013.0487

TY - GEN

T1 - Thick film PZT transducer arrays for particle manipulation

AU - Qiu, Yongqiang

AU - Wang, Han

AU - Bolhovitins, Aleksandrs

AU - Demore, Christine

AU - Cochran, Sandy

AU - Gebhardt, Sylvia

AU - Schonecker, Andreas

PY - 2013

Y1 - 2013

N2 - This paper reports the fabrication and evaluation of a two-dimensional thick film PZT ultrasonic transducer array operating at about 7.5 MHz for particle manipulation. All layers on the array are screen-printed and sintered on an AlO substrate without further processes or patterning. The measured dielectric constant of the PZT is 2250 ± 100, and the dielectric loss is 0.09 ± 0.005 at 10 kHz. Finite element analysis has been used to predict the behaviour of the array and impedance spectroscopy and laser vibrometry have been used to characterise its performance. The measured deflection of a single activate element is on the order of tens of nanometres with 20 V input. Particle manipulation experiments have been performed by coupling the thick film array to a capillary containing polystyrene microspheres in water.

AB - This paper reports the fabrication and evaluation of a two-dimensional thick film PZT ultrasonic transducer array operating at about 7.5 MHz for particle manipulation. All layers on the array are screen-printed and sintered on an AlO substrate without further processes or patterning. The measured dielectric constant of the PZT is 2250 ± 100, and the dielectric loss is 0.09 ± 0.005 at 10 kHz. Finite element analysis has been used to predict the behaviour of the array and impedance spectroscopy and laser vibrometry have been used to characterise its performance. The measured deflection of a single activate element is on the order of tens of nanometres with 20 V input. Particle manipulation experiments have been performed by coupling the thick film array to a capillary containing polystyrene microspheres in water.

KW - 2-D array

KW - particle manipulation

KW - screen-printing

KW - thick film

UR - http://www.scopus.com/inward/record.url?scp=84894297909&partnerID=8YFLogxK

U2 - 10.1109/ULTSYM.2013.0487

DO - 10.1109/ULTSYM.2013.0487

M3 - Conference contribution

AN - SCOPUS:84894297909

SN - 9781467356862

SP - 1911

EP - 1914

BT - Ultrasonics Symposium (IUS), 2013 IEEE International

PB - IEEE

T2 - Ultrasonics Symposium (IUS), 2013 IEEE International

Y2 - 21 July 2013 through 25 July 2013

ER -

Thick film PZT transducer arrays for particle manipulation

Abstract

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Development of Electronic Systems for Ultrasonic Particle Manipulation

Development of Ultrasonic Devices for Microparticle and Cell Manipulation

Cite this

Thick film PZT transducer arrays for particle manipulation

Abstract

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Student theses

Development of Electronic Systems for Ultrasonic Particle Manipulation

Development of Ultrasonic Devices for Microparticle and Cell Manipulation

Cite this