Ultra-precision grinding of PZT ceramics-Surface integrity control and tooling design

Keyphrases

• Technical Factors 100%
• Surface Quality 100%
• Surface Integrity Control 100%
• Control Design 100%
• Ceramic Surface 100%
• Material Removal 100%
• Tool Design 100%
• Lead Zirconate Titanate Ceramic 100%
• Ultra-precision Grinding 100%
• Polymer Layer 50%
• Porosity 50%
• Statistical Analysis 50%
• Surface Roughness 50%
• Design Improvement 50%
• Surface Flatness 50%
• Vacuum Chuck 50%
• Roughness Surface 50%
• Surface Integrity 50%
• Large Depth 50%
• Material Removal Mechanism 50%
• Depth of Cut 50%
• Surface Form 50%
• Influence Surface 50%
• Machine Design 50%
• Soft Contact 50%
• Grinding Conditions 50%
• Suggested Model 50%

Engineering

• Titanate 100%
• Lead Zirconate 100%
• Grinding (Machining) 100%
• Surface Integrity 100%
• Polycrystalline 100%
• Material Removal 50%
• Surface Quality 50%
• Subsurface 25%
• Flatness 25%
• Machine Design 25%
• Induced Damage 25%
• Material Removal Mechanism 25%
• Porosity 25%

Material Science

• Lead Zirconate Titanate Ceramics 100%
• Surface Property 100%
• Ceramic Surface 100%
• Surface (Surface Science) 100%
• Surface Roughness 50%
• Machining 50%